Transpector® XPR 3+ - INFICON

Селекция на CAD модел

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Company	INFICON
Description	Transpector® XPR 3+
Bill of material	TZ07MOOEQ
ORDERNO	TZ07MOOEQ TZ07MOOEQ
MASS_POSITION_STABILITY mass position stability	0.1 amu over 24 hours
MAXIMUM_OPERATING_PRESSURE__FC_OR_EM_MODE_ maximum operating pressure (fc or em mode)	20 mTorr (2.6E-2 mbar)
MAXIMUM_OPERATING_PRESSURE__LINEAR_OPERATION_ maximum operating pressure (linear operation)	10 mTorr (1.3E-2 mbar)
MINIMUM_DETECTABLE_PARTIAL_PRESSURE__EM_MODE_ minimum detectable partial pressure (em mode)	≤6E-12 Torr (8E-12 mbar)
MINIMUM_DETECTABLE_PARTIAL_PRESSURE__FC_MODE_ minimum detectable partial pressure (fc mode)	≤1E-9 Torr (1.3E-9 mbar)
SENSITIVITY__FC_MODE_ sensitivity (fc mode)	≥4E-7 ampsTorr (3E-7 ampsmbar)
SENSITIVITY__NOMINAL_ sensitivity (nominal)	≥8E-3 ampsTorr (3E-3 ampsmbar)
NAME name	TZ07MOOEQ TZ07MOOEQ