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SCR3100S

  1. JEL Corporation
CAD model selection
Selectable products: 24
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Company
JEL Corporation
Description
Robot for Semiconductor
Bill of material
SCR3100S
ORDERNO
ARM__R_AXIS_
arm (r-axis)
CARRYING_OBJECT
carrying object
CARRYING_SPEED
carrying speed
CLEANLINESS
cleanliness
CONTROL_AXIS
control axis
CONTROLLER_MODEL
controller model
END_EFFECTOR_TYPE__THICKNESS_
end-effector type (thickness)
END_EFFECTORWRIST_BLOCK_UNIT
end-effectorwrist-block unit
FROM_THE_ROBOT_CENTER_TO_THE_WAFER_CENTER
from the robot center to the wafer center
INTERFACE
interface
MAPPING_SENSOR
mapping sensor
MASS
mass
MODEL_NAME
model name
MOTOR_TYPE
motor type
OPERATING_RANGE
operating range
REPEATABILITY
repeatability
ROBOT_MODEL
robot model
ROBOT_MODEL_TYPE
robot model type
ROTATION_ANGLE__THETA_AXIS_
rotation angle (theta-axis)
SARS00169
sars00169
SARS00958
sars00958
SARS02659
sars02659
SARS02967
sars02967
SARS08603
sars08603
SIZE_OF_CARRYING_OBJECT
size of carrying object
THICKNESS_OF_ATTACHING_END_EFFECTOR
thickness of attaching end-effector
TOTAL_LENGTH
total length
UTILITY
utility
VERTICAL_STROKE__Z_AXIS_
vertical stroke (z-axis)
WAFER_HOLDING_METHOD
wafer holding method
NAME
name
CARRYING_SPEED__AVE__
carrying speed (ave.)
CARRYING_SPEED__MAX__
carrying speed (max.)
HANDLING_LEVEL
handling level
RESOLUTION
resolution
CARRYING_SPEED_AVE__
carrying speed(ave.)
VAR1ST_JOINT_AXIS__J1_AXIS_2ND_JOINT_AXIS__J2_AXIS_
1st joint axis (j1-axis)2nd joint axis (j2-axis)
VAR3RD_JOINT_AXIS__J3_AXIS_3RD_JOINT_AXIS__J5_AXIS_
3rd joint axis (j3-axis)3rd joint axis (j5-axis)
VAR3RD_JOINT_CENTER
3rd joint center
VACUUM_RESISTANCE
vacuum resistance
Z_AXIS__J4_AXIS_
z-axis (j4-axis)
CARRYING_SPEED__AVE____1_
carrying speed (ave.) (1)
CARRYING_SPEED__MAX____1_
carrying speed (max.) (1)
OPERATING_RANGE__1_
operating range (1)
OPERATING_RANGE__AVE__
operating range (ave.)
CARRYING_SPEED___
carrying speed ()
FROM_ROBOT_CENTER_TO_WAFER_CENTER
from robot center to wafer center
OPERATING_RANGE___
operating range ()
RESOLUTION___
resolution ()
ROTATION_ANGLE__Θ_AXIS_
rotation angle (θ-axis)
SART08604
sart08604
SART08661
sart08661
SART08668
sart08668
SART08674
sart08674
SART08675
sart08675
SART08676
sart08676
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