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CAD모델 선택

사용 가능한 제품: 24

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Company	JEL Corporation
Description	Robot for Semiconductor
Bill of material	SCR3100S
ORDERNO	SCR3100S SCR3100S
ARM__R_AXIS_ arm (r-axis)	Within ±0.1mm Within ±0.1mm
CARRYING_OBJECT carrying object	Wafer up to 300mm Wafer up to 300mm
CARRYING_SPEED carrying speed
CLEANLINESS cleanliness	RS232C and parallel photo IO RS232C and parallel photo IO
CONTROL_AXIS control axis	3-axis 3-axis
CONTROLLER_MODEL controller model	SARS00169 SARS00169
END_EFFECTOR_TYPE__THICKNESS_ end-effector type (thickness)	SARS02659 SARS02659
END_EFFECTORWRIST_BLOCK_UNIT end-effectorwrist-block unit	None None
FROM_THE_ROBOT_CENTER_TO_THE_WAFER_CENTER from the robot center to the wafer center	340deg 340deg
INTERFACE interface	38mm 38mm
MAPPING_SENSOR mapping sensor	SARS00958 SARS00958
MASS mass
MODEL_NAME model name	None None
MOTOR_TYPE motor type	Stepping motor Stepping motor
OPERATING_RANGE operating range
REPEATABILITY repeatability	C4000 series C4000 series
ROBOT_MODEL robot model	SCR3100S-200-PM SCR3100S-200-PM
ROBOT_MODEL_TYPE robot model type	Cylindrical coordinate type Cylindrical coordinate type
ROTATION_ANGLE__THETA_AXIS_ rotation angle (theta-axis)	ISO Class 2 (at wafer transfer level when exhausting driving part) ISO Class 2 (at wafer transfer level when exhausting driving part)
SARS00169 sars00169	2mm 2mm
SARS00958 sars00958	None None
SARS02659 sars02659	SARS02967 SARS02967
SARS02967 sars02967	3mm 3mm
SARS08603 sars08603	75mm 75mm
SIZE_OF_CARRYING_OBJECT size of carrying object	3mm 3mm
THICKNESS_OF_ATTACHING_END_EFFECTOR thickness of attaching end-effector	38mm 38mm
TOTAL_LENGTH total length	2mm 2mm
UTILITY utility
VERTICAL_STROKE__Z_AXIS_ vertical stroke (z-axis)	Power DC24V±10% 8A; Vacuum -53kPa or more Power DC24V±10% 8A; Vacuum -53kPa or more
WAFER_HOLDING_METHOD wafer holding method	75mm 75mm
NAME name	SCR3100S SCR3100S
CARRYING_SPEED__AVE__ carrying speed (ave.)	280degsec 280degsec
CARRYING_SPEED__MAX__ carrying speed (max.)	170mmsec 170mmsec
HANDLING_LEVEL handling level
RESOLUTION resolution
CARRYING_SPEED_AVE__ carrying speed(ave.)
VAR1ST_JOINT_AXIS__J1_AXIS_2ND_JOINT_AXIS__J2_AXIS_ 1st joint axis (j1-axis)2nd joint axis (j2-axis)
VAR3RD_JOINT_AXIS__J3_AXIS_3RD_JOINT_AXIS__J5_AXIS_ 3rd joint axis (j3-axis)3rd joint axis (j5-axis)
VAR3RD_JOINT_CENTER 3rd joint center
VACUUM_RESISTANCE vacuum resistance
Z_AXIS__J4_AXIS_ z-axis (j4-axis)
CARRYING_SPEED__AVE____1_ carrying speed (ave.) (1)
CARRYING_SPEED__MAX____1_ carrying speed (max.) (1)
OPERATING_RANGE__1_ operating range (1)
OPERATING_RANGE__AVE__ operating range (ave.)	397.7mm 397.7mm
CARRYING_SPEED___ carrying speed ()
FROM_ROBOT_CENTER_TO_WAFER_CENTER from robot center to wafer center
OPERATING_RANGE___ operating range ()
RESOLUTION___ resolution ()
ROTATION_ANGLE__Θ_AXIS_ rotation angle (θ-axis)
SART08604 sart08604
SART08661 sart08661
SART08668 sart08668
SART08674 sart08674
SART08675 sart08675
SART08676 sart08676

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SCR3100S