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Company
ASI
Description
MS-4400 XYZ Automated Stage
Bill of material
MS4400ASSEMBLYwithBX51HEBottomPlate
ORDERNO
VAR0_635_MM__EXTRA_FINE_
0.635 mm (extra-fine)
2.2 nm
VAR1_59_MM__FINE_
1.59 mm (fine)
5.5 nm
VAR12_70_MM__SUPER_COARSE_
12.70 mm (super-coarse)
44 nm
VAR25_40_MM__ULTRA_COARSE_
25.40 mm (ultra-coarse)
88 nm
VAR6_35_MM__STANDARD_
6.35 mm (standard)
22 nm
AXIS
axis
Resolution
LEAD_SCREW_PITCH_OPTIONS
lead screw pitch options
Rotary Encoder Resolution
XY
xy
10 nm
XY_AXIS_MAXIMUM_VELOCITY
xy axis maximum velocity
7 mm sec
XY_AXIS_RANGE_OF_TRAVEL
xy axis range of travel
120 mm x 100 mm (may be limited by microscope)
XY_AXIS_RESOLUTION__ROTARY_ENCODER_STEP_
xy axis resolution (rotary encoder step)
22 nm
XY_AXIS_RMS_REPEATABILITY
xy axis rms repeatability
700 nm
NAME
name
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格式
历史记录
3D
2D

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