MS-4400 XYZ Automated Stage - ASI

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Company	ASI
Description	MS-4400 XYZ Automated Stage
Bill of material	MS4400ASSEMBLYwithBX51HEBottomPlate
ORDERNO	MS4400ASSEMBLYwithBX51HEBottomPlate MS4400ASSEMBLYwithBX51HEBottomPlate
VAR0_635_MM__EXTRA_FINE_ 0.635 mm (extra-fine)	2.2 nm
VAR1_59_MM__FINE_ 1.59 mm (fine)	5.5 nm
VAR12_70_MM__SUPER_COARSE_ 12.70 mm (super-coarse)	44 nm
VAR25_40_MM__ULTRA_COARSE_ 25.40 mm (ultra-coarse)	88 nm
VAR6_35_MM__STANDARD_ 6.35 mm (standard)	22 nm
AXIS axis	Resolution
LEAD_SCREW_PITCH_OPTIONS lead screw pitch options	Rotary Encoder Resolution
XY xy	10 nm
XY_AXIS_MAXIMUM_VELOCITY xy axis maximum velocity	7 mm sec
XY_AXIS_RANGE_OF_TRAVEL xy axis range of travel	120 mm x 100 mm (may be limited by microscope)
XY_AXIS_RESOLUTION__ROTARY_ENCODER_STEP_ xy axis resolution (rotary encoder step)	22 nm
XY_AXIS_RMS_REPEATABILITY xy axis rms repeatability	700 nm
NAME name	MS4400ASSEMBLYwithBX51HEBottomPlate MS4400ASSEMBLYwithBX51HEBottomPlate