Aligner - JEL Corporation

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Company	JEL Corporation
Description	Aligner
Bill of material	SAL3361
ORDERNO	SAL3361 SAL3361
CARRYING_OBJECT carrying object	SEMI standard 3 inch, 100 mm, 125 mm, 150 mm silicon wafer with primary flat SEMI standard 3 inch, 100 mm, 125 mm, 150 mm silicon wafer with primary flat
CLEANLINESS cleanliness	ISO Class 2 (at wafer transfer level when exhausting driving part) ISO Class 2 (at wafer transfer level when exhausting driving part)
DRIVING_METHOD driving method	2-phase stepping motor (for 3 axes)(internal motor driver) 2-phase stepping motor (for 3 axes)(internal motor driver)
POSITIONING_ACCURACY positioning accuracy	Centering Within ±0.1 mmFlat locatingNotch locating Within ±0.1 deg Centering Within ±0.1 mmFlat locatingNotch locating Within ±0.1 deg
POSITIONING_TIME positioning time	Centering to orientation flatnotch locating Approx. 3 sec Centering to orientation flatnotch locating Approx. 3 sec
SENSOR sensor	Laser sensor Laser sensor
UTILITY utility	Power DC24V±10% 3A; Vacuum -53 kPa or more Power DC24V±10% 3A; Vacuum -53 kPa or more
NAME name	SAL3361 SAL3361
WAFER_SIZE_CHANGE wafer size change